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Edwards nEXT85渦輪分子泵

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產品名稱: Edwards nEXT85渦輪分子泵
產品型號: B8G210A01
產品展商: Edwards
產品文檔: 無相關文檔

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Edwards nEXT85渦輪分子泵  的詳細介紹

Edwards nEXT85 Compound Turbomolecular Vacuum Pump - NEW

The nEXT85 turbomolecular pump builds upon the success of the highly successful EXT75DX to deliver a pump with significantly improved performance in a smaller package.

The rotor has been totally re-designed to optimise pump performance and achieve both higher speeds and higher compression while maintaining high levels of reliability.

In addition to enhanced performance nEXT85 benefits from the same service and operational functionalities from the larger nEXT range, including field serviceability and in-built intelligence, for a truly class leading product.

Specifications nEXT85D
NW-40 		nEXT85H
NW-40 		nEXT85D
ISO-63 		nEXT85H
ISO-63 		nEXT85D
CF-63 		nEXT85H
CF-63 		nEXT85D
ISO-100 		nEXT85H
ISO-100
Main inlet pumping speed  l/s
    N2 47 84 86
    He 61 78 80 78
    H2 49 44 60 54 60 54 60 54
    Ar 44 80 84
Peak compression ratio from the backing port to the main inlet port
    N2 > 1011
    He 8 x 106 2 x 107 8 x 106 2 x 107 8 x 106 2 x 107 8 x 106 2 x 107
    H2 2 x 105
    Ar > 1011
Ultimate pressure
mbar (Torr) 		< 5 x 10-9 (< 3.8 x 10-9) < 5 x 10-10 (< 3.8 x 10-10) < 5 x 10-9 (< 3.8 x 10-9)
Weight 2.9 kg (6.4 lbs) 3 kg (6.6 lbs) 4.4 kg (9.7 lbs) 3.2 kg (7 lbs)
  Forced air cooling (20°C Ambient) Natural convection (35°C Ambient) Forced air cooling (40°C Ambient) Water cooling (40°C Ambient)
Maximum continuous backing pressure at ultimate inlet pressure  mbar
    N2 18 10 11 17
Maximum input flow  sccm
    N2 60 22 25 42
    Ar 21 7 15
    He 232 96 128 191
Operation Vertical and upright to horizontal ± 2°
 
Edwards MODEL: nEXT85 Compound Turbomolecular Vacuum Pump - NEW

CODE: B8G2-10-B01 / B8G210B01  nEXT85D  ISO-63 NW-16 80W
CODE: B8G2-10-C01 / B8G210C01  nEXT85D  CF-63 NW-16 80W
CODE: B8G2-10-101 / B8G210101  nEXT85D  ISO-100 NW-16 80W
      B8G2-10-A01 / B8G210A01  nEXT85D  NW-40 NW-16 80W
      B8G2-40-101 / B8G240101  nEXT85D  ISO-100 NW-25 80W
      B8G2-11-B01 / B8G211B01  nEXT85ID  ISO-63 NW-16/16 80W
      B8G2-14-B01 / B8G214B01  nEXT85ID  ISO-63 NW-16/25 80W
      B8G4-10-B01 / B8G410B01  nEXT85H  ISO-63 NW-16 80W
      B8G4-10-C01 / B8G410C01  nEXT85H  CF-63 NW-16 80W
      B8G4-10-A01 / B8G410A01  nEXT85H  NW-40 NW-16 80W
      B8G4-11-C01 / B8G411C01  nEXT85IH  CF-63 NW-16/16 80W
      B8G4-10-101 / B8G410101  nEXT85H  ISO-100 NW-16 80W
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