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Edwards STP 451磁懸浮渦輪泵

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產品名稱: Edwards STP 451磁懸浮渦輪泵
產品型號: B74841010
產品展商: Edwards
產品文檔: 無相關文檔

簡單介紹


Edwards STP 451磁懸浮渦輪泵  的詳細介紹

Edwards STP 451 Turbomolecular Vacuum Pump - NEW

Edwards high performance STPH301C turbomolecular pump has been designed for use in the harshest of semiconductor applications. The pumps field proven reliability and class-leading performance give maximum process flexibility. The STPH301C has been approved for use by major equipment manufacturers in the semiconductor and magnetic media industries.

Advanced Rotor Technology

  • Higher gas throughput
  • Maximized process flexibility
  • Oil free
  • Low vibration
  • High reliability
  • Maintenance free
  • Harsh process compatible
  • Increased life

Advanced Controller Design

  • Auto tuning
  • Self diagnostic functions
  • DC motor drive
  • Battery-free operation

Compact Design

  • Small footprint
  • Half rack controller

5 Axis Magnetic Suspension System

  • Zero contamination
  • Low maintenance
  • Any orientation operation
Inlet flange ISO160
Outlet port KF25
Pumping Speed  
N2 440 l s-1
H2 275 l s-1
Compression ratio  
N2 >108
H2 >2 x 104
Ultimate pressure 10-7 Pa (10-9 Torr)
Maximum allowable inlet pressure  
Ambient cooled 0.066 Pa (5 x 10-4 Torr)
Maximum continuous outlet pressure  
Ambient cooled 13 Pa (0.1 Torr)
Rated speed 48000 rpm
Starting time 3 min
Maximum inlet flange temperature 120 °C
Input voltage 100 to 120 V a.c. (± 10) or
  200 to 240 V a.c. (± 10)
Power consumption  
Start up 0.55 kVA
Weight  
Pump 12 kg
Controller 7 kg
B74841010 P021 451 PUMP ICF203/DN160CF KF25 
B74840030 P021 451 PUMP ISO160K KF25
B74851010 P021 451C PUMP ISO160K KF25 KF10
B74861010 P021 451C PUMP ICF203/DN160CF KF25 KF10
YT21Z0Z01 SCU-350 CONTROL UNIT (100V/200V)
B70700010 P021 CONNECTION CABLE 3M STRAIGHT
B70700000 P021 CONNECTION CABLE 5M STRAIGHT
B70700040 P021 POWER CABLE 5M RING TERMINAL
B70700090 P021 POWER CABLE 3M RING TERMINAL
B70700130 P021 CONNECTION CABLE 10M STRAIGHT
YT21CA001 P021 WATER COOLING UNIT HORIZONTAL 
YT011A003 P021 COOLING FAN 115V 1M
YT011A005 P021 COOLING FAN 220V-240V 1M
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