Edwards STPH 451C Turbomolecular Vacuum Pump - NEW

Edwards high performance STPH451C turbomolecular pump has been designed for use in the harshest of semiconductor applications. The pumps field proven reliability and class-leading performance give maximum process flexibility. The STPH451C has been approved for use by major equipment manufacturers in the semiconductor and magnetic media industries.

Advanced Rotor Technology

• Higher gas throughput
• Maximized process flexibility
• Oil free
• Low vibration
• High reliability
• Maintenance free
• Harsh process compatible
• Increased life

Advanced Controller Design

• Auto tuning
• Self diagnostic functions
• DC motor drive
• Battery-free operation

Compact Design

• Small footprint
• Half rack controller

5 Axis Magnetic Suspension System

• Zero contamination
• Low maintenance
• Any orientation operation

Edwards STPH451C Turbomolecular Vacuum Pump - NEW

P/N B719-01-001 / B71901001  STPH451C  ISO-160K
P/N PT34-0Z-005 / PT340Z005  STPH451C  DN 160 CF
P/N YT34-16-007 / YT3416007  STPH451CV  ISO-160F TMS
    YT34-16-006 / YT3416006  STPH451CV  DN 160 CF TMS