Edwards STP1003 / C Turbomolecular Vacuum Pump - NEW Edwards corrosion resistant STP1003C is a new turbomolecular pump for use in the most advanced of semiconductor applications. Edwards’s rotor technology gives class-leading performance for maximum process flexibility. This pump has been approved for use by major equipment manufacturers in the semiconductor and magnetic media industries. Advanced Rotor Technology Maximized process flexibility Oil free Low vibration High reliability Maintenance free Harsh process compatible (C version) Increased life Advanced Controller Design Auto tuning Self diagnostic functions DC motor drive Battery-free operation Compact Design Small footprint Half rack controller Inlet flange ISO-200F Outlet port KF-40 Purge port KF-10 Water cooling fitting PT1/4 Pumping speed N2 1,000 l/s H2 800 l/s Compression ratio N2 > 108 H2 105 Ultimate pressure w/ bake out heating 10-7 Pa (10-9 Torr) Max. continuous outlet pressure 13 Pa (0.1 Torr) Max. nitrogen throughput 2,500 sccm Rated speed 35,000 rpm Starting time 6 min Max inlet flange temperature 120°C Input voltage 100 to 120 Power consumption 0.8 kVA Weight 31 kg Edwards STP1003 / C Turbomolecular Vacuum Pump - NEW P/N YT39-0Z-001 / YT390Z001 STP1003 ISO-200F P/N YT39-B0-010 / YT39B0010 STP1003 DN 200 CF P/N YT39-B0-130 / YT39B0130 STP1003C ISO-200F PT39-AZ-003 / PT39AZ003 STP1003C DN 200 CF
Edwards STP1003 / C Turbomolecular Vacuum Pump - NEW
Edwards corrosion resistant STP1003C is a new turbomolecular pump for use in the most advanced of semiconductor applications. Edwards’s rotor technology gives class-leading performance for maximum process flexibility. This pump has been approved for use by major equipment manufacturers in the semiconductor and magnetic media industries.
Advanced Rotor Technology
Advanced Controller Design
Compact Design
Edwards STP1003 / C Turbomolecular Vacuum Pump - NEW P/N YT39-0Z-001 / YT390Z001 STP1003 ISO-200F P/N YT39-B0-010 / YT39B0010 STP1003 DN 200 CF P/N YT39-B0-130 / YT39B0130 STP1003C ISO-200F PT39-AZ-003 / PT39AZ003 STP1003C DN 200 CF
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