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Edwards iXL120N干式真空泵

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產品名稱: Edwards iXL120N干式真空泵
產品型號: A54114410
產品展商: Edwards
產品文檔: 無相關文檔

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Edwards iXL120N干式真空泵  的詳細介紹

Edwards iXL120N Semiconductor Dry Vacuum Pump - NEW

The iXL120 is a low energy, compact dry pump system that can be mounted on tool or remotely. It is designed to give extremely low cost of ownership. The iXL120 is intended only for use on clean duty applications. The iXL120 is not intended for use with potentially flammable, corrosive, toxic or other hazardous gases since these gases or oxygen can mix within the pump system.


Typical peak pumping speed (no gas purge/cold pump)     110 m3/h-1 / 65 cfm
Ultimate pressure 0.01 mbar / 8 mTorr
Pump inlet flange ISO-63 / NW50
Exhaust gas outlet NW25
Intended use Indoor use
Operating ambient temperature range 5 to 40°C
Storage ambient temperature range -45 to 55°C
Maximum relative humidity 80% for temperatures up to 31°C decreasing linearly to 50% relative humidity at 40°C
Maximum operating altitude up to 2,000 m
Pollution degree II (IEC 61010) (Normally only non-conductive pollution occurs. Occasionally, however, temporary conductivity caused by condensation must be expected)
Atmosphere Non flammable and non-corrosive
Degree of protection provided by enclosure IP31D (EN60529: Degrees of protection provided by enclosures)
Dimensions 450 x 230 x 275 mm
Mass 59 kg
Noise level (at ultimate) < 55 dB(A)
Vibration level at inlet < 1.5 mm s-1
Vibration to the floor (when docked) < 0.05 mm s-1
Initial force to push the pump 0.06 kN
Sustained force to push the pump 0.04 kN
Warm up time to nominal pumping performance 45 min 

Edwards MODEL iXL120N Semiconductor Dry Vacuum Pump - NEW

CODE No A541-14-010 / A54114010  iXL120N  E 200-460V 3/8 QC Water Fittings
CODE No A541-14-020 / A54114020  iXL120N  E 200-460V 1/4 QC Water Fittings
CODE No A541-14-210 / A54114210  iXL120N  E 200-460V SPI TIM 3/8 QC Water Fittings
        A541-14-410 / A54114410  iXL120N  E 200-460V TEL 3/8 QC Water Fittings
        A541-14-011 / A54114011  iXL120N  E 200-460V 3/8 QC Water Fittings Flow Cont Valve
        A541-14-411 / A54114411  iXL120N  E 200-460V TEL 3/8 QC Water Fittings Flow Cont Valve


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