免费精品国产综合久久精品_在线精品国产一区二区三区_国产精品香蕉自产拍在线观看_国产中文欧美日韩亚洲精品专区_国产色欲一区二区精品

產品資料

Edwards iH600半導體真空泵

如果您對該產品感興趣的話,可以
產品名稱: Edwards iH600半導體真空泵
產品型號: A59020957
產品展商: Edwards
產品文檔: 無相關文檔

簡單介紹


Edwards iH600半導體真空泵  的詳細介紹

Edwards iH600 Semiconductor Dry Vacuum Pump - NEW

Edwards advanced semiconductor vacuum pumps have been field-proven to perform to the highest operating standards. Reliability and high performance are achieved by extending service life, improving uptime and increasing productivity, while minimizing footprint and cost of ownership.

The iH Series offers high reliability for difficult processes, such as PECVD and LPCVD, where particulate, condensable and corrosive by-products are present.


 

Peak speed

600 m3h-1
353 cfm
10,000 lmin-1
Ultimate vacuum 7 x 10-4 mbar
5.3 x 10-4 Torr
0.07 Pa
Typical shaft seal nitrogen flow 4 slm
Inlet connection ISO100
Outlet connection NW40
Typical cooling water flow at 15 psi pressure drop     240 lh-1
4 lmin-1
Weight 415 kg
Power input at ultimate 3.4 kW
Rated motor power 6.1 kW
Oil capacity 1.43 l 

Edwards iH600 Semiconductor Dry Vacuum Pump - NEW

A59020908 / A590-20-908  iH600  MK5 460V 60Hz three-phase
A59020945 / A590-20-945  iH600  MK5 200/208V 50/60Hz 3-phase
A59020946 / A590-20-946  iH600  MK5 380/415V 50/60Hz 3-phase
A59020957 / A590-20-957  iH600  MK5 230V 60Hz 3-phase


產品留言
標題
聯系人
聯系電話
內容
驗證碼
點擊換一張
注：1.可以使用快捷鍵Alt+S或Ctrl+Enter發送信息!
2.如有必要,請您留下您的詳細聯系方式!
Copyright@ 2003-2025  上海赫哲真空設備有限公司版權所有      電話：021-34051018 傳真：021-64900946 地址：上海市松江區書慧路628號 郵編：201612
         滬ICP備13000672號-3     

滬公網安備 31011702004251號